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<p>Yttria-stabilized zirconia (YSZ)-based mixed-potential-type sensors are highly promising for in situ detection of NO<sub>2</sub> in vehicle exhaust due to their multiple detection capabilities and chemical stability. However, achieving precise control over the microstructure and thickness in the sensitive electrode preparation process remains challenging, thereby hindering further optimization of sensor performance. In this study, sensors with regular Cr<sub>2</sub>O<sub>3</sub> thin films were fabricated on a YSZ substrate using the photolithography and templating methods. Based on this, five electrode structures with different three-phase boundary (TPB) lengths (<i>L</i><sub>TPB</sub>) were obtained, and the film thickness was measured to be about 162&#xa0;nm. It was observed that the response and sensitivity of the sensors to NO<sub>2</sub> have increased with the rise of <i>L</i><sub>TPB</sub>, and the reduced film thickness also facilitates gas diffusion. Analysis shows that the self-regulation of both electrode microstructure and thickness has a positive significance for the improvement of sensor performance.</p>

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Mixed-potential-type YSZ-based sensor with regularthin-film electrodes using photolithography technique

  • 期刊论文

  • 发表日期：

    2025年5月21日

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  • Yichen Sun,
  • Jie Zou,
  • Huanhuan Zhang,
  • Chao Yang,
  • Xiaoli Wang,
  • Keda Bao,
  • Fenglin Li,
  • Liangliang Tian,
  • Jiawen Jian

摘要

Yttria-stabilized zirconia (YSZ)-based mixed-potential-type sensors are highly promising for in situ detection of NO2 in vehicle exhaust due to their multiple detection capabilities and chemical stability. However, achieving precise control over the microstructure and thickness in the sensitive electrode preparation process remains challenging, thereby hindering further optimization of sensor performance. In this study, sensors with regular Cr2O3 thin films were fabricated on a YSZ substrate using the photolithography and templating methods. Based on this, five electrode structures with different three-phase boundary (TPB) lengths (LTPB) were obtained, and the film thickness was measured to be about 162 nm. It was observed that the response and sensitivity of the sensors to NO2 have increased with the rise of LTPB, and the reduced film thickness also facilitates gas diffusion. Analysis shows that the self-regulation of both electrode microstructure and thickness has a positive significance for the improvement of sensor performance.