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<p>Cobalt (Co) metallization presents a promising alternative strategy for the bottom interconnect in advanced chip manufacture, yet the interfacial structure and functionality of an organic additive essential for superconformal Co deposition is far from clear given the concurring hydrogen evolution reaction (HER). Herein, interfacial electrochemistry for a model additive molecule MBIS (sodium 2-mercapto-5-benzimidazolesulfonate) at a Co electrode is investigated by applying <i>in situ</i> surface-enhanced infrared absorption spectroscopy and electrochemical quartz crystal microbalance combined with density functional theory calculations. The vertical plane adsorption of MBIS on the Co surface via thiolate reduces the overall reduction current with a higher/lower Faradaic efficiency (FE) towards HER/Co deposition due to the significant blockage of surface Co sites as well as the formation of Co(II) complex with MBIS. Surface coverage of MBIS is found to decrease with increasing pH and overpotential, which may account for the location-dependent functionality of MBIS in practical Co deposition in vias. This work provides a molecular-level insight into the interfacial mechanism of an organic additive essential for the Co superfilling scenario.</p>

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Decoding the interfacial structure and functionality of an organic additive for superconformal cobalt electrodeposition

  • 期刊论文

  • 发表日期：

    2025年5月6日

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  • Zijie Mao,
  • Xianglong Du,
  • Xindi Xu,
  • Yicai Wu,
  • Xiaohui Yang,
  • Kun Jiang,
  • Jun Cheng,
  • Zhi-You Zhou,
  • Shi-Gang Sun,
  • Wen-Bin Cai

摘要

Cobalt (Co) metallization presents a promising alternative strategy for the bottom interconnect in advanced chip manufacture, yet the interfacial structure and functionality of an organic additive essential for superconformal Co deposition is far from clear given the concurring hydrogen evolution reaction (HER). Herein, interfacial electrochemistry for a model additive molecule MBIS (sodium 2-mercapto-5-benzimidazolesulfonate) at a Co electrode is investigated by applying in situ surface-enhanced infrared absorption spectroscopy and electrochemical quartz crystal microbalance combined with density functional theory calculations. The vertical plane adsorption of MBIS on the Co surface via thiolate reduces the overall reduction current with a higher/lower Faradaic efficiency (FE) towards HER/Co deposition due to the significant blockage of surface Co sites as well as the formation of Co(II) complex with MBIS. Surface coverage of MBIS is found to decrease with increasing pH and overpotential, which may account for the location-dependent functionality of MBIS in practical Co deposition in vias. This work provides a molecular-level insight into the interfacial mechanism of an organic additive essential for the Co superfilling scenario.