<p>This work introduces, an optimized Dual Gate Vertical Junction Tunnel FET sensor (DG-VJ-TFET) to evaluate the quality of water based on dielectric modulation technique. DG-VJ-TFET sensor has a double cavity on either side of the gate oxide for sensing the biomolecules. The proposed device has been optimized in terms of oxide material, oxide thickness, channel thickness, and channel material. Furthermore, the optimized device is investigated as sensor to evaluate the quality of water. Tentative fabrication process of the DG-VJ-TFET is presented. Nanocavities of 6 nm were etched on both the sides of gate dielectric. The proposed structure showed a rectification ratio of 2 × 10<sup>4</sup>, SS of 26 mV/decade. Dielectric constant of different water biomolecules varies the transfer and output characteristics that suggests I<sub>OFF</sub> current to be the sensing metric of DG-V-TFET. Silvaco ATLAS TCAD tool has been utilized for numerical calculation process. The maximum sensitivity and I<sub>ON</sub>/I<sub>OFF</sub> is observed for pure ice i.e., 57 and 8 × 10<sup>6</sup>, respectively, so DG-VJ-TFET presents strong candidature for evaluating the water quality.</p>

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Design & Implementation of Nano Cavity TFET Based Smart Sensor for Water Quality

  • Lucky Agarwal,
  • Shreyas V. Devadiga,
  • Swati Dixit,
  • Varun Mishra

摘要

This work introduces, an optimized Dual Gate Vertical Junction Tunnel FET sensor (DG-VJ-TFET) to evaluate the quality of water based on dielectric modulation technique. DG-VJ-TFET sensor has a double cavity on either side of the gate oxide for sensing the biomolecules. The proposed device has been optimized in terms of oxide material, oxide thickness, channel thickness, and channel material. Furthermore, the optimized device is investigated as sensor to evaluate the quality of water. Tentative fabrication process of the DG-VJ-TFET is presented. Nanocavities of 6 nm were etched on both the sides of gate dielectric. The proposed structure showed a rectification ratio of 2 × 104, SS of 26 mV/decade. Dielectric constant of different water biomolecules varies the transfer and output characteristics that suggests IOFF current to be the sensing metric of DG-V-TFET. Silvaco ATLAS TCAD tool has been utilized for numerical calculation process. The maximum sensitivity and ION/IOFF is observed for pure ice i.e., 57 and 8 × 106, respectively, so DG-VJ-TFET presents strong candidature for evaluating the water quality.