Design and Analysis of a Robust Gyroscope via Grating SPP on Cantilever

In this paper, using a MOEMS cantilever, an opto-plasmonic gyroscope is introduced. A metallic grating, as the substrate for surface plasmon polaritons, is employed on the cantilever. The mechanical structure converts input angular velocity into a change of the light incidence angle, then reflected optical power is measured by a photo-detector. Subsequently, the output current of the sensor is modulated according to the input angular velocity. This robust system has a simple and effective structure, and the simulation results propose characteristics including optical sensitivity of \(0.13\;{\text{nW}}/(^\circ /{\text{s}})\) $0.13\text{nW}/{(}^{\circ }/\text{s})$ , total sensitivity of \(0.05\;{\text{nA}}/(^\circ /{\text{s}})\) $0.05\text{nA}/{(}^{\circ }/\text{s})$ , ultra-wide measurement range of \(\pm 567228217.18 \;^\circ /{\text{s}}\) $\pm 567228217.18{}^{\circ }/\text{s}$ , and resolution of \(0.77 \;^\circ /{\text{s}}\) $0.77{}^{\circ }/\text{s}$ . Moreover, the operating wavelength is λ = 630 nm with a minimum required laser power of 73 pW, and the designed structure has dimensions of \(15 \times 30 \times 6\;{\mu m}^{3}\) $15\times 30\times 6{\mu m}^3$ . Furthermore, a comprehensive study on the effects of various mechanical and optical parameters on the performance of the gyroscope is presented, and a comparative study is done.