<p>The paper deals with the TiAlN-based coating synthesis using cathodic arc deposition. The deposition process is performed on an ion plasma vacuum installation consisting of the hot cathode and the additional plasma source “PINK”. The paper studies the influence of different values of the discharge current of the “PINK” on physical and mechanical properties of the coating and its structure and phase composition.</p>

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Cathodic arc deposition of TiAlN coatings and its influence on their physical and mechanical properties, structure and phase composition

  • K. N. Ramazanov,
  • M. S. Syrtanov,
  • Yu. G. Khusainov,
  • V. R. Mukhamadeev,
  • A. Yu. Nazarov,
  • A. M. Zarifullina

摘要

The paper deals with the TiAlN-based coating synthesis using cathodic arc deposition. The deposition process is performed on an ion plasma vacuum installation consisting of the hot cathode and the additional plasma source “PINK”. The paper studies the influence of different values of the discharge current of the “PINK” on physical and mechanical properties of the coating and its structure and phase composition.