Simulation of lateral distribution of resistivity and charge carrier lifetime in chromium-compensated gallium arsenide wafers
摘要
The paper proposes a four-level model which includes deep and shallow acceptors and donors, allowing to predict characteristics for the HR GaAs:Cr material and sensors. It is shown that the best agreement between the simulated values and experimental data of the non-equilibrium charge carrier lifetime, Hall mobility, and resistivity of the HR GaAs:Cr material, is achieved at the EL2 center concentration in the range of (1 to 3)∙1015 cm–3, the Cr concentration of about 1∙1017 cm–3, and the concentration of thermal acceptors in the range of (1 to 4)∙1016 cm–3. It is shown that EL2+ and Cr ionized centers are the dominant deep levels that determine the lifetime of respectively non-equilibrium electrons and holes in LEC HR GaAs:Cr.