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<p>A&#xa0;TiN coating formed in the vacuum-arc discharge plasma is studied, which possesses artificially created thickness non-uniformity due to the use of the shadow mask technique. The influence of the width between the mask channels and the samples on the distributions of the coating thickness, microhardness, and adhesion is examined. A&#xa0;sharp decrease of the thickness in the shadow region is found to be from 45&#xa0;to 95% and that of the microhardness—from 60&#xa0;to 80%. No coating delamination is revealed in measuring the coating adhesion by scratch testing.</p>

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Investigation of shadow region influence on TiN coating properties

  • 期刊论文

  • 发表日期：

    2025年2月1日

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  • A. V. Oleinik,
  • A. A. Nikolaev,
  • K. N. Ramazanov,
  • A. Yu. Nazarov,
  • A. R. Haitkulov,
  • V. P. Muhamadeev,
  • A. A. Maslov,
  • Yu. G. Khusainov

摘要

A TiN coating formed in the vacuum-arc discharge plasma is studied, which possesses artificially created thickness non-uniformity due to the use of the shadow mask technique. The influence of the width between the mask channels and the samples on the distributions of the coating thickness, microhardness, and adhesion is examined. A sharp decrease of the thickness in the shadow region is found to be from 45 to 95% and that of the microhardness—from 60 to 80%. No coating delamination is revealed in measuring the coating adhesion by scratch testing.