DC Magnetron Discharge with Pure Calcium Target
摘要
The paper focuses on magnetron sputtering of the pure calcium target in DC magnetron discharge. The target diameter and thickness are 50 and 3 mm, respectively. Argon and krypton are used as working gases. Continuous and medium frequency discharges are investigated along with the discharge and plasma parameters, including a current–voltage characteristic, mass-to-charge ratio of the plasma composition, ion current, and deposition rate.