Impedance Spectroscopy Based on Microwave Probe Measurements

We have studied the influence of non-ideal standard loads of the probe station on the accuracy of microwave impedance spectrum measurements in the process of testing electronic devices and materials. Using the Cascade Microtech station as an example, it is shown that the calibration procedure based on standard loads leads to significant measurement errors. Prospects for improving load characteristics in order to eliminate errors are given. An original technique of impedance measurement, which is free of these problems, is considered.