AlN Plasma Emission Behavior in Argon Atmosphere
摘要
AlN plasma emission behavior in argon atmosphere has been investigated by infrared nanosecond laser using optical emission spectroscopy (OES) diagnostics. The effect of argon pressure on the time–space evolution of the plasma composition, as well as the dependence of electron number density, has been studied. To investigate the impact of the ambient gas nature on the temporal behavior of plasma species, we performed space and time resolved emission spectroscopy. Time of flight (TOF) measurements of neutral and ionized Al, N, and Ar species revealed the presence of double and triple structure, depending on the ambient gas nature. In an argon atmosphere, slower components of Al and N exhibited backward motion. The faster Al⁺ component unaffected by the surrounding gas and followed a propagation profile like that observed in vacuum. The kinetics of all plasma species were investigated.