<p>In this study, we present a novel pulsed microwave-induced plasma (MIP) source coupled with a glow discharge for optical emission spectrometry (MIP-OES), operating at 1000 W power and a frequency of 2.45 GHz. The MIP cavity consists of a stainless steel cylindrical waveguide connected to a circular resonator made of the same material, joined through a dielectric quartz disc. The output of the MIP cavity is linked to a closed glow discharge quartz tube and a mechanical pump. Numerical simulations were employed to optimize the structure and dimensions of the MIP cavity. The nozzle position of the cylindrical resonator's output was precisely adjusted to align with the maximum magnetic field, achieving the TM<sub>011</sub> mode, which results in a point plasma with high density. This configuration enables the cavity to produce a dense, warm plasma emission zone with a consistent emission rate around the circumference of the emitting source. The results demonstrate that the designed MIP source exhibits a significantly higher density and temperature compared to other sources with similar microwave parameters.</p>

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Characterization and Optimization of Microwave-Induced Plasma for Enhanced Optical Emission Spectrometry

  • H. Sadeghi,
  • S. M. Sadat Kiai,
  • Samaneh Fazelpour,
  • S. P. Shirmardi,
  • Shahriar Fathi

摘要

In this study, we present a novel pulsed microwave-induced plasma (MIP) source coupled with a glow discharge for optical emission spectrometry (MIP-OES), operating at 1000 W power and a frequency of 2.45 GHz. The MIP cavity consists of a stainless steel cylindrical waveguide connected to a circular resonator made of the same material, joined through a dielectric quartz disc. The output of the MIP cavity is linked to a closed glow discharge quartz tube and a mechanical pump. Numerical simulations were employed to optimize the structure and dimensions of the MIP cavity. The nozzle position of the cylindrical resonator's output was precisely adjusted to align with the maximum magnetic field, achieving the TM011 mode, which results in a point plasma with high density. This configuration enables the cavity to produce a dense, warm plasma emission zone with a consistent emission rate around the circumference of the emitting source. The results demonstrate that the designed MIP source exhibits a significantly higher density and temperature compared to other sources with similar microwave parameters.