High precision terahertz sensing of microfluids using a circular flux-wave shaped resonator based metamaterial absorber
摘要
This study evaluates a metamaterial-based microfluidic sensor (MMS) characterized by an exceptionally efficient absorption mechanism and a typical sensitivity for fluid analysis. The layered structure of the MMS incorporates a silicon substrate with a thin metallic reflector, a microfluidic channel, a circular flux-wave-shaped resonator, and a cover layer on top of the resonator. A numerical study has been implemented within the frequency range of 1–3 THz, revealing a resonance at 1.432 THz accompanied by a notch depth of -45 dB. The proposed MMS demonstrates a near-perfect absorption of 99.99%. The attained sensitivity is 405 GHz/permittivity, as indicated by the shift in resonance resulting from variations in the permittivity of the microfluidic channel. A Q-factor of 18.36 emphasizes the sensor’s precision and reliability in detecting minor variations in liquid characteristics. The circular flux-wave-shaped resonator is a distinctive characteristic of this architecture, which optimizes wave direction, intensifies interaction, and assures exceptional performance. This study demonstrates the capabilities of the MMS for use in biomedical technology, environmental monitoring, liquid quality assessments, and complex terahertz sensing technologies, featuring a novel and compact design.