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<p>The paper presents a novel approach for a three-dimensional relief formation on Iceland spar plates using laser-induced microplasma generated from a pyrographite target via laser ablation to fabricate phase-polarization optical elements with tailored phase and polarization characteristics. Iceland spar, known for its unique optical properties, including birefringence and optical clarity, presents significant challenges in precision microfabrication due to its anisotropic structure. The study focuses on optimizing laser parameters for the erosive plasma torch formation and the subsequent etching of Iceland spar, guided by preliminary experimental investigations and energy calculations. Key factor such as the overlap coefficients in the focal spot is explored for impact on the reproducibility of etching depths and the accuracy of depth deviations, with an emphasis on precision in microfabrication. Experimental results show that the deviation accuracy of etching depths no more than 0.1&#xa0;μm achieved with the optimal overlap coefficients of 0.5. Additionally, the fabrication and testing of the 4-sector phase plate on Iceland spar designed for the wavelength of 0.53&#xa0;µm with etched areas providing the phase shift of π with the deviation of 0.06π (determined by the achieved etching depth deviation accuracy) are presented. The results demonstrate the potential of laser-induced microplasma as an effective tool for fabrication phase-polarization optical elements on birefringent substrates.</p>

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Optimization of fabrication technology of phase-polarization optical elements on Iceland spar by laser-induced microplasma

  • 期刊论文

  • 发表日期：

    2025年7月12日

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  • Galina Kostyuk,
  • Nikita Nesterov,
  • Vadim Veiko,
  • Victoria Shkuratova,
  • Svetlana Khonina,
  • Alexey Porfirev,
  • Andrey Petrov,
  • Anton Sennov

摘要

The paper presents a novel approach for a three-dimensional relief formation on Iceland spar plates using laser-induced microplasma generated from a pyrographite target via laser ablation to fabricate phase-polarization optical elements with tailored phase and polarization characteristics. Iceland spar, known for its unique optical properties, including birefringence and optical clarity, presents significant challenges in precision microfabrication due to its anisotropic structure. The study focuses on optimizing laser parameters for the erosive plasma torch formation and the subsequent etching of Iceland spar, guided by preliminary experimental investigations and energy calculations. Key factor such as the overlap coefficients in the focal spot is explored for impact on the reproducibility of etching depths and the accuracy of depth deviations, with an emphasis on precision in microfabrication. Experimental results show that the deviation accuracy of etching depths no more than 0.1 μm achieved with the optimal overlap coefficients of 0.5. Additionally, the fabrication and testing of the 4-sector phase plate on Iceland spar designed for the wavelength of 0.53 µm with etched areas providing the phase shift of π with the deviation of 0.06π (determined by the achieved etching depth deviation accuracy) are presented. The results demonstrate the potential of laser-induced microplasma as an effective tool for fabrication phase-polarization optical elements on birefringent substrates.