<p>MEMS resonators exhibiting nonlinear mode coupling, especially MEMS mirror devices, have garnered increasing attention due to their complex dynamic behaviors and promising application prospects in recent years. However, these nonlinear dynamics limited by insufficient modeling frameworks and experimental investigation remain insufficiently understood and underutilized. A comprehensive understanding and accurate prediction of mode coupling phenomena in MEMS mirrors are crucial for improving the reliability of Micro-Opto-Electro-Mechanical Systems (MOEMS). This review provides a systematic analysis of nonlinear mode coupling in MEMS mirrors, drawing insights from broader MEMS resonator research and related mirror geometry studies to advance fundamental understanding. We first discuss key nonlinear mode coupling phenomena and their underlying mechanism, including internal resonance, parametric resonance, combination resonance, and frequency combs. Furthermore, advances in theoretical modeling are summarized, alongside strategies for mitigating mode coupling effects. Finally, we discuss the methods for leveraging these nonlinear characteristics for potential applications and attempt to provide richer references and new inspirations for future research in the field of nonlinear dynamics or MEMS devices.</p>

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Nonlinear mode coupling in MEMS Mirrors: from complex dynamics to advanced applications

  • Yu Fan,
  • Zhiran Yi,
  • Boyang Peng,
  • Xiaoyong Fang,
  • Jiahao Wu,
  • Lei Shao,
  • Wenming Zhang

摘要

MEMS resonators exhibiting nonlinear mode coupling, especially MEMS mirror devices, have garnered increasing attention due to their complex dynamic behaviors and promising application prospects in recent years. However, these nonlinear dynamics limited by insufficient modeling frameworks and experimental investigation remain insufficiently understood and underutilized. A comprehensive understanding and accurate prediction of mode coupling phenomena in MEMS mirrors are crucial for improving the reliability of Micro-Opto-Electro-Mechanical Systems (MOEMS). This review provides a systematic analysis of nonlinear mode coupling in MEMS mirrors, drawing insights from broader MEMS resonator research and related mirror geometry studies to advance fundamental understanding. We first discuss key nonlinear mode coupling phenomena and their underlying mechanism, including internal resonance, parametric resonance, combination resonance, and frequency combs. Furthermore, advances in theoretical modeling are summarized, alongside strategies for mitigating mode coupling effects. Finally, we discuss the methods for leveraging these nonlinear characteristics for potential applications and attempt to provide richer references and new inspirations for future research in the field of nonlinear dynamics or MEMS devices.