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<p>The paper is devoted to the urgent problem of creation of the efficient micromechanical tools aimed at the manipulation with microobjects in microelectromechanical systems. In recent years, layered amorphous-crystalline ribbons made of rapidly quenched TiNiCu alloy with two-way shape-memory effect are successfully used for manufacturing microtweezers. We describe a&#xa0;method and develop an original experimental installation for the evaluation of the parameters of two-way shape memory effect in these ribbons. The thermomechanical characteristics of an amorphous-crystalline composite produced by using the melt-spinning technique with a&#xa0;thickness of the amorphous layer of 25 μm and the thickness of a&#xa0;crystalline layer of 7 μm are investigated. The influence of multiple thermal cycling is studied within the range of manifestation of the shape memory effect. The obtained maximum level of reversible bending strains in the ribbon exceeds 0.2%, which guarantees the possibility of manufacturing of micromechanical devices (microtweezers). An increase in the number of thermal cycles from 1&#xa0;to 100 leads to a&#xa0;noticeable elevation of the level of reversible strains (by about a&#xa0;factor of&#xa0;1.2) and about a&#xa0;twofold narrowing of temperature hysteresis of the two-way shape-memory effect. At the same time, the characteristic temperatures vary insignificantly, except a&#xa0;noticeably increasing temperature of the onset of form changing in the process of cooling. The accumulated results enable us to improve the functional characteristics of micromechanical instruments produced from the ribbons based on the TiNiCu amorphous-crystalline alloy, which improves the reliability and operating speed of the tools and decreases their overall dimensions.</p>

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Method for determining the parameters of the two-way shape-memory effect in amorphous-crystalline ribbons made of tiNiCu alloy

  • 期刊论文

  • 发表日期：

    2025年2月1日

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  • A. V. Shelyakov,
  • D. A. Khachatrian,
  • K. A. Borodako,
  • N. N. Sitnikov

摘要

The paper is devoted to the urgent problem of creation of the efficient micromechanical tools aimed at the manipulation with microobjects in microelectromechanical systems. In recent years, layered amorphous-crystalline ribbons made of rapidly quenched TiNiCu alloy with two-way shape-memory effect are successfully used for manufacturing microtweezers. We describe a method and develop an original experimental installation for the evaluation of the parameters of two-way shape memory effect in these ribbons. The thermomechanical characteristics of an amorphous-crystalline composite produced by using the melt-spinning technique with a thickness of the amorphous layer of 25 μm and the thickness of a crystalline layer of 7 μm are investigated. The influence of multiple thermal cycling is studied within the range of manifestation of the shape memory effect. The obtained maximum level of reversible bending strains in the ribbon exceeds 0.2%, which guarantees the possibility of manufacturing of micromechanical devices (microtweezers). An increase in the number of thermal cycles from 1 to 100 leads to a noticeable elevation of the level of reversible strains (by about a factor of 1.2) and about a twofold narrowing of temperature hysteresis of the two-way shape-memory effect. At the same time, the characteristic temperatures vary insignificantly, except a noticeably increasing temperature of the onset of form changing in the process of cooling. The accumulated results enable us to improve the functional characteristics of micromechanical instruments produced from the ribbons based on the TiNiCu amorphous-crystalline alloy, which improves the reliability and operating speed of the tools and decreases their overall dimensions.