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<p>This study examined the nonlinear dynamics of an electrostatically excited microbeam with two thin PZT layers. The design utilized an initially curved microbeam to achieve a wider stable travel range under electrostatic excitation. Analytical model was formulated to optimize the beam’s dimensions and analyze its static and dynamic behavior, such as deflection profiles, resonant frequencies, and vibration responses. The findings reveal several nonlinear effects, including snap-through mechanism, a softening effect near the first natural frequency, and a hardening effect near the third resonance. Additionally, applying a DC voltage to the PZT layers induces an axial force either tensile or compressive based on the voltage polarity that modifies the microbeam’s stiffness. This enables active tuning of the natural frequency and dynamic characteristics.</p>

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Softening and hardening effects of an electrostatically actuated curved microbeam bounded by two thin PZT layers

  • 期刊论文

  • 发表日期：

    2025年7月11日

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  • Ayman Alneamy,
  • Hassen Ouakad

摘要

This study examined the nonlinear dynamics of an electrostatically excited microbeam with two thin PZT layers. The design utilized an initially curved microbeam to achieve a wider stable travel range under electrostatic excitation. Analytical model was formulated to optimize the beam’s dimensions and analyze its static and dynamic behavior, such as deflection profiles, resonant frequencies, and vibration responses. The findings reveal several nonlinear effects, including snap-through mechanism, a softening effect near the first natural frequency, and a hardening effect near the third resonance. Additionally, applying a DC voltage to the PZT layers induces an axial force either tensile or compressive based on the voltage polarity that modifies the microbeam’s stiffness. This enables active tuning of the natural frequency and dynamic characteristics.