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<p>Anchor loss is a critical factor affecting the performance of bulk acoustic wave resonators. It refers to the dissipation of acoustic energy from the resonator into the surrounding substrate or support structures through the anchors holding the resonator. This paper presents an approach to enhance the quality factor and reduce the anchor loss of a thin-film piezoelectric-on-silicon MEMS resonator by using a BOX-shaped Phononic Crystal structure. The BOX-shaped Phononic Crystal (BOX-PnC) creates a bandgap, effectively preventing wave transmission through the tether to the resonator anchors. This bandgap frequency range extended from 92 to 274&#xa0;MHz with a width of 182&#xa0;MHz, representing 99% gap-mid gap percentage. The results demonstrate that applying BOX-PnC on resonator anchors reduces the insertion loss from 2.6 to 0.8&#xa0;dB, improves the anchor quality factor from 36,000 to 1,250,000, and increases the unloaded Q-factor from 8,463 to 94,033, achieving enhancements of 34.7-fold and 3.25-fold, respectively.</p>

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Enhancement of the quality factor of thin-film-piezoelectric-on-Si MEMS resonator using BOX shape phononic crystal

  • 期刊论文

  • 发表日期：

    2025年6月9日

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  • Mohammed Awad,
  • Temesgen Bailie Workie,
  • Koriakova Natalia,
  • Jing-Fu Bao,
  • Ken-ya Hashimoto

摘要

Anchor loss is a critical factor affecting the performance of bulk acoustic wave resonators. It refers to the dissipation of acoustic energy from the resonator into the surrounding substrate or support structures through the anchors holding the resonator. This paper presents an approach to enhance the quality factor and reduce the anchor loss of a thin-film piezoelectric-on-silicon MEMS resonator by using a BOX-shaped Phononic Crystal structure. The BOX-shaped Phononic Crystal (BOX-PnC) creates a bandgap, effectively preventing wave transmission through the tether to the resonator anchors. This bandgap frequency range extended from 92 to 274 MHz with a width of 182 MHz, representing 99% gap-mid gap percentage. The results demonstrate that applying BOX-PnC on resonator anchors reduces the insertion loss from 2.6 to 0.8 dB, improves the anchor quality factor from 36,000 to 1,250,000, and increases the unloaded Q-factor from 8,463 to 94,033, achieving enhancements of 34.7-fold and 3.25-fold, respectively.