Low power poly-silicon hot plate for MEMS based gas sensor applications: electro thermal response characterization
摘要
Gas sensors with MEMS technology play a vital role in various sectors in order to measure the concentration of different environmental gases as well as hazardous gases emitted by variety of sources such as industries and vehicles. The important criteria for MEMS sensor are power consumption of the sensor during gas measurement and uniform temperature distribution to the sensing layer of the sensor. The proposed design is low power consumption of hotplate for MEMS-based gas sensor, so the proposed low-power poly-silicon hotplate gives optimized power consumption to provide the uniform temperature distribution of 1551.85 °C to the sensing material of the MEMS sensor in order to improve the sensitivity. Finite element method analysis is used to design hotplate for MEMS-based gas sensor using poly-silicon material which results in optimized power consumption of about 2.5 mW with required temperature distribution to the sensing layer, and this less power consumption of hotplate provides the low power usage for the sensor. The observed effective thermal conductivity of the hotplate is 0.7 × 105 W mK−1, and the maximum observed surface electric field is about 1.5 × 105 mV m−1. This research is mainly focused on application of air quality monitoring using MEMS sensor mounted in the micro-UAV.