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<p>Titanium dioxide (TiO<sub>2</sub>) thin films were deposited at 350 °C on thoroughly cleaned substrates using an economical spray pyrolysis process. The film’s structural, morphological, compositional, optical, and electrical properties were examined using XRD, Raman spectroscopy, XPS, FTIR, SEM, EDS, UV-Vis-NIR, and Hall-effect methods. The XRD analysis reveals the anatase nature of the film, with a reduction in peak intensities observed in the sample annealed at 450 °C. The EDX investigation reveals that the film is composed only of Ti and O, which has been confirmed by XPS analysis. FTIR studies confirmed the existence of Ti-O-Ti stretching bonds. The Raman spectra indicate the existence of microstress and anatase phases. SEM images suggest recrystallization during annealing may result in a slight rise in grain size within the crystalline films. The optical study reveals that air annealing is a useful technique to tailor a film’s porosity. The Hall effect study indicates the n-type material conductivity of films. Four distinct target gases-nitrogen dioxide (NO<sub>2</sub>), carbon dioxide (CO<sub>2</sub>), ammonia (NH₃), and hydrogen (H<sub>2</sub>) were used to study the gas selectivity of the TiO<sub>2</sub> nanostructured-based metal oxide sensor at various operating temperatures. The sensor exhibits excellent stability, NO<sub>2</sub> gas selectivity, and response. The sensor’s optimum operating temperature was determined to be 250 °C and at this temperature, a response time of 53 s and a recovery time of 125 s were observed for a 5 ppm NO<sub>2</sub> gas concentration. The developed sensor may find use in medical and industrial fields.</p> Graphical abstract <p></p>

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Influence of air annealing on the characteristics of spray-deposited TiO2 thin films and their use as NO2 gas sensors

  • 期刊论文

  • 发表日期：

    2025年9月2日

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  • RS Madhukeswara,
  • R. Shashidhar,
  • A. Raghu,
  • GS Prakasha

摘要

Titanium dioxide (TiO2) thin films were deposited at 350 °C on thoroughly cleaned substrates using an economical spray pyrolysis process. The film’s structural, morphological, compositional, optical, and electrical properties were examined using XRD, Raman spectroscopy, XPS, FTIR, SEM, EDS, UV-Vis-NIR, and Hall-effect methods. The XRD analysis reveals the anatase nature of the film, with a reduction in peak intensities observed in the sample annealed at 450 °C. The EDX investigation reveals that the film is composed only of Ti and O, which has been confirmed by XPS analysis. FTIR studies confirmed the existence of Ti-O-Ti stretching bonds. The Raman spectra indicate the existence of microstress and anatase phases. SEM images suggest recrystallization during annealing may result in a slight rise in grain size within the crystalline films. The optical study reveals that air annealing is a useful technique to tailor a film’s porosity. The Hall effect study indicates the n-type material conductivity of films. Four distinct target gases-nitrogen dioxide (NO2), carbon dioxide (CO2), ammonia (NH₃), and hydrogen (H2) were used to study the gas selectivity of the TiO2 nanostructured-based metal oxide sensor at various operating temperatures. The sensor exhibits excellent stability, NO2 gas selectivity, and response. The sensor’s optimum operating temperature was determined to be 250 °C and at this temperature, a response time of 53 s and a recovery time of 125 s were observed for a 5 ppm NO2 gas concentration. The developed sensor may find use in medical and industrial fields.

Graphical abstract