Ga₂O₃ deposition methods by low-cost techniques: a review

Gallium oxide (Ga₂O₃) is a promising material for the development of optoelectronic devices due to its array of suitable properties tailored for such applications. This review paper focuses on low-cost fabrication methods, which include spray-pyrolysis and sol–gel (dip-coating, spin-coating). Furthermore, the operation principle of these methods for synthesizing Ga₂O₃ thin films are summarized. The properties and applications of Ga₂O₃ produced by these methods are highlighted to emphasize the benefits of such economical techniques. While disadvantages of these methods are not disregarded. Overall, the aim of this review is to offer a starting point for researchers to develop gallium oxide thin films of acceptable properties for specific applications with a low budget.