Template-assisted growth of micro-excavated PDMS layer for fabrication of free standing TENG and its application as a self-powered sensor for Oscillation
摘要
In this paper, a highly sensitive freestanding dielectric to dielectric triboelectric nanogenerator (FD-TENG) is fabricated and successfully used as a self-powered oscillation monitoring sensor. The FD-TENG is made of microstructured Polydimethylsiloxane (PDMS) as one of the layers and Polyester (PET) as the second layer. The feature size of the structure on the PDMS surface is 1–10 μm, which is obtained by Aluminum (Al) mold. The device’s performance is measured by fixing it on a laboratory machine for vibratory motion. The fabricated FD-TENG gave an output power of 11.56µW/cm2 at a load resistance of 100MΩ at vibration frequency of 5 Hz. The FD-TENG is successfully used as an oscillation sensor in compound pendulum experiment.