<p>This paper examines the transverse deflection of a homogeneous, isotropic, visco-thermoelastic rectangular plate of silicon nitride subjected to time-harmonic load. The plate’s edges are considered under different boundary conditions, including all supported edges and a combination of simply supported and clamped edges. The deflection analysis makes use of integral transforms. Laplace transform and the finite Fourier sine transform are used for the solution of the model. The procedure of residues is used for inverse Laplace transform. MATLAB software is used to perform the numerical computation of the dimensionless deflection expression. Graphical analysis is conducted to explore the effects of different modes across various boundary conditions. The study investigates the variation of deflection under different circumstances. The study may find applications in the development and design of resonators (sensors and actuators), MEMS, and NVH control devices.</p>