Exploring the Effect of the Density of \(\textbf{Y}_{0.5} \textrm{Gd}_{0.5} \textrm{Ba}_2 \textrm{Cu}_3 \textrm{O}_{7-\delta }\) Target on Superconducting Thin Films
摘要
In this work, the effect of intrinsic doping of YGBCO target density on superconducting thin films is systematically discussed. YGBCO superconducting films generated with varying densities of YGBCO targets are all pure C-axis orientated after process optimization, but the crystallinity of the films varies, and the crystalline property of the superconducting films developed from the target with the lowest density is the best. YGBCO films made with the best density objective had in-plane and out-of-plane textures of 3.5° and 1.4°, respectively. Thin film surface morphology is affected by the density of the target material; the minimal surface roughness can be as low as 5.5 nm, The critical current of YGBCO film prepared by target with the minimum density is 135 A, and the greatest current density is 5.4×