Fabrication and Characterization of X-ray TES Detectors Based on Annular AlMn Alloy Films
摘要
AlMn alloy films are widely fabricated into superconducting transition edge sensors (TESs) for the detection of cosmic microwave background radiation. However, the application in X-ray or gamma-ray detection based on AlMn TES is rarely reported. In this study, X-ray TES detectors based on unique annular AlMn films are developed. The fabrication processes of TES detectors are introduced in detail. The characteristics of three TES samples are evaluated in a dilution refrigerator. The results demonstrate that the I-V characteristics of the three annular TES detectors are highly consistent. The TES detector with the smallest absorber achieved the best energy resolution of 11.0 eV @ 5.9 keV, which is inferior to the theoretical value. The discrepancy is mainly attributed to the larger readout electronics noise than expected.