Development of Kinetic Inductance Detector on ZrO\(_2\) Substrate for Double-Beta Decay Search

Lumped element kinetic inductance detector (LEKID) is a promising superconducting energy detector that will advance the search for rare physics events, for instance, double-beta decay. We focus on the application of LEKIDs in the search for double-beta decay with particular attention to \(^{94}\) $_{}^{94}$ Zr. This proceeding reports the implementation of LEKID on unique material substrate, ZrO \(_2\) $_2^{}$ substrate. It was confirmed that it actually worked. This achievement marks a significant milestone toward realizing the search of rare physics events utilizing LEKIDs.