Structural and gas sensing properties of Au-doped TiO2:Fe2O3: CeO2 thin films prepared by chemical spray pyrolysis
摘要
In this study, thin films containing titanium dioxide (TiO₂), iron (III) oxide (Fe2O3) and cerium oxide (CeO2), with varying Fe2O3:CeO2 concentrations ranging from 0 to 30 wt% and 10 wt% gold nanoparticles (AuNPs), were prepared on glass using chemical spray pyrolysis. The structural, morphological, and sensing properties of the prepared thin films were examined. XRD analysis revealed that a phase transformation occurred based on the dopant concentration: films with x = 0 or 0.1 formed a polycrystalline anatase structure, whereas those with intermediate concentrations (x = 0.15 or 0.20) were amorphous. At higher doping concentrations (x = 0.25, 0.30), the structure developed a hematite Fe2O3, CeO2 and Au phase. Morphologically, atomic force microscopy (AFM) revealed that surface roughness initially decreased and then increased at the beginning of impurity introduction; however, at x = 0.15, roughness was significantly high. Gas sensing measurements were carried out through resistance measurements in the absence of, and exposure to, reducing gas (H2S) and oxidizing gas (NO2). The results showed that sensitivity and selectivity varied depending on the gas sensing performance. The addition of Fe2O3:CeO2 increased sensitivity to the reducing gas (H2S) significantly, reaching a peak response of 36.31 at x = 0.15 and an operating temperature of 423 K, whereas doping decreased sensitivity to the oxidizing gas (NO2). The highest sensitivity of 30.13 was achieved at x = 0.1, making this the most effective sensor for this gas at 523 K.