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<p>This work represents a preliminary study introducing a novel methodology for minimizing refractive index dispersion in TiO<sub>x</sub> multilayer thin films through dynamic modulation of pulsed DC power and frequency. Two dynamic deposition strategies were employed: (i) ascending and descending pulsed DC power sequences (100–225 W) at a fixed frequency of 120 kHz, and (ii) ascending and descending pulse-frequency sequences (0–120 kHz) at a fixed power of 200 W. X-ray diffraction revealed a nanocrystalline, oxygen-deficient TiO<sub>x</sub> phase, with crystallite sizes ranging from ~ 11.7 to 15.7&#xa0;nm. Film thickness was found to be primarily governed by discharge power, reaching ~ 100 nm for power-modulated films and ~ 50 nm for frequency-modulated films. Surface roughness (Ra) ranged from ~ 8 to 13&#xa0;nm for power-modulated films and from ~ 8 to 10&#xa0;nm for frequency-modulated films. Optical measurements revealed high visible transparency, particularly for frequency-modulated films (&gt; 88%), whereas power-modulated films exhibited lower visible but higher infrared transparency. The optical band gap ranged from ~ 3.97 to 4.12&#xa0;eV, reflecting the combined influence of crystallite size, defect-related states, and possible microstructural compactness. The refractive index varied from ~ 2.49 to 2.97 with weak dispersion across the visible range (≈3.19–7.45%), indicating good optical uniformity and film homogeneity. The results confirm the practical feasibility of this approach, while more advanced analyses will be pursued in future work to broaden and fully validate the methodology. Overall, this study highlights the originality of dynamic modulation as a promising route for tailoring optical properties and may inspire further applications in advanced optical coating technologies.</p>

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Minimizing light dispersion in multilayer TiOx films via DC pulsed magnetron sputtering

  • 期刊论文

  • 发表日期：

    2026年6月25日

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  • Al-Zahraa A. Abd El-Moula,
  • Fayez M. El-Hossary,
  • Omayma F. Hassanein,
  • Mohammed H. Fawey

摘要

This work represents a preliminary study introducing a novel methodology for minimizing refractive index dispersion in TiOx multilayer thin films through dynamic modulation of pulsed DC power and frequency. Two dynamic deposition strategies were employed: (i) ascending and descending pulsed DC power sequences (100–225 W) at a fixed frequency of 120 kHz, and (ii) ascending and descending pulse-frequency sequences (0–120 kHz) at a fixed power of 200 W. X-ray diffraction revealed a nanocrystalline, oxygen-deficient TiOx phase, with crystallite sizes ranging from ~ 11.7 to 15.7 nm. Film thickness was found to be primarily governed by discharge power, reaching ~ 100 nm for power-modulated films and ~ 50 nm for frequency-modulated films. Surface roughness (Ra) ranged from ~ 8 to 13 nm for power-modulated films and from ~ 8 to 10 nm for frequency-modulated films. Optical measurements revealed high visible transparency, particularly for frequency-modulated films (> 88%), whereas power-modulated films exhibited lower visible but higher infrared transparency. The optical band gap ranged from ~ 3.97 to 4.12 eV, reflecting the combined influence of crystallite size, defect-related states, and possible microstructural compactness. The refractive index varied from ~ 2.49 to 2.97 with weak dispersion across the visible range (≈3.19–7.45%), indicating good optical uniformity and film homogeneity. The results confirm the practical feasibility of this approach, while more advanced analyses will be pursued in future work to broaden and fully validate the methodology. Overall, this study highlights the originality of dynamic modulation as a promising route for tailoring optical properties and may inspire further applications in advanced optical coating technologies.