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<p>Nitrogen dioxide (NO<sub>2</sub>), a harmful gas primarily produced by fossil fuels, is a major air pollutant associated with respiratory and chronic disorders. Developing gas sensors capable of detecting NO<sub>2</sub> at low concentrations is crucial for human health and the environment. This research employed a hydrothermal method that is non-toxic, environmentally friendly, and cost-effective to fabricate gas sensors utilizing nanostructured In<sub>2</sub>O<sub>3</sub> thin films and In<sub>2</sub>O<sub>3</sub>–CuO composite films on porous silicon substrates. CuO concentrations varied between 5 and 10%. The sensing, morphological, and structural capabilities of the thin films were evaluated. The results of the study indicate that the developed films possess a polycrystalline structure, and the incorporation of copper oxide results in the formation of a composite phase. In addition, the incorporation of CuO significantly alters the crystallization behavior, resulting in the formation of smaller crystallites at the nanoscale. The AFM data indicate that reducing grain size and increasing both average and RMS surface roughness enhance the films’ active surface area. Moreover, an increase in copper oxide content leads to a decrease in optical transmittance and bandgap, suggesting a modification in the electrical structure. The data reveal that at 150°C, the maximum gas response of 20.1 at 45 ppm NO <sub>2</sub> presents a significant result.</p>

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Hydrothermally synthesized In2O3–CuO/n-Si heterojunctions for high-performance NO2 gas sensing

  • 期刊论文

  • 发表日期：

    2026年5月8日

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  • Mohammed J. AlSultani,
  • Yahya R. Hathal,
  • M. O. Salman,
  • Husam S. Al-Arab

摘要

Nitrogen dioxide (NO2), a harmful gas primarily produced by fossil fuels, is a major air pollutant associated with respiratory and chronic disorders. Developing gas sensors capable of detecting NO2 at low concentrations is crucial for human health and the environment. This research employed a hydrothermal method that is non-toxic, environmentally friendly, and cost-effective to fabricate gas sensors utilizing nanostructured In2O3 thin films and In2O3–CuO composite films on porous silicon substrates. CuO concentrations varied between 5 and 10%. The sensing, morphological, and structural capabilities of the thin films were evaluated. The results of the study indicate that the developed films possess a polycrystalline structure, and the incorporation of copper oxide results in the formation of a composite phase. In addition, the incorporation of CuO significantly alters the crystallization behavior, resulting in the formation of smaller crystallites at the nanoscale. The AFM data indicate that reducing grain size and increasing both average and RMS surface roughness enhance the films’ active surface area. Moreover, an increase in copper oxide content leads to a decrease in optical transmittance and bandgap, suggesting a modification in the electrical structure. The data reveal that at 150°C, the maximum gas response of 20.1 at 45 ppm NO 2 presents a significant result.