Sol–gel spin-coated vanadium oxide thin films for carbon monoxide gas sensing
摘要
Vanadium oxide thin films were fabricated via a sol–gel spin-coating technique and annealed at 500 °C for carbon monoxide (CO) gas sensing applications. X-ray diffraction and Fourier transform infrared spectroscopy confirmed the formation of crystalline vanadium oxide with characteristic V–O and V = O bonding, while field-emission scanning electron microscopy (FESEM) revealed a dense nanogranular morphology with a uniform ultrathin film thickness of approximately 25 nm. Energy-dispersive X-ray analysis (EDAX) verified the compositional purity of the films. The optical properties were investigated using UV–Vis spectroscopy, and the optical bandgap was determined to be approximately 2.67 eV using the Tauc plot method, indicating suitable electronic properties for sensing applications. The gas sensing performance was evaluated over a CO concentration range of 10–500 ppm at operating temperatures of 100–300 °C. The sensor exhibited a nonlinear and concentration-dependent response, with sensitivity increasing from approximately 0.1 at 10 ppm to approximately 0.65 at 500 ppm at 100 °C. A maximum resistance modulation of approximately 25.5 MΩ (from ~ 30 MΩ to ~ 4.5 MΩ) was observed at 100 °C, indicating enhanced sensing performance at lower operating temperature. The sensor also demonstrated stable baseline characteristics under continuous operation. These results demonstrate that sol–gel derived ultrathin vanadium oxide films exhibit stable, reproducible, and efficient CO sensing performance, highlighting their potential for low-temperature gas sensing applications.