Scholarlink

<p>This work reports the fabrication and characterization of titanium dioxide (TiO₂) thin films deposited on flexible polyethylene naphthalate (PEN) substrates for application as sensing electrodes in extended-gate field-effect transistor (EGFET) pH sensors. The TiO<sub>2</sub> films were prepared using a sol–gel spin-coating method and subjected to drying at different temperatures (room temperature, 30, 50, 70, and 100&#xa0;°C). Structural and compositional analyses using scanning electron microscopy (SEM) and energy-dispersive X-ray spectroscopy (EDX) revealed that moderate thermal treatment enhanced surface uniformity and Ti–O bonding, while excessive heating led to grain growth and compositional shifts. Electrical evaluation of the fabricated devices showed that the TiO<sub>2</sub>/PEN electrode dried at 50&#xa0;°C exhibited the best performance, with a sensitivity of 46&#xa0;mV/pH and a linearity of 0.9986, approaching the theoretical Nernstian response. In contrast, samples dried at higher temperatures demonstrated reduced sensitivity and increased hysteresis, whereas drying at room temperature produced poor structural cohesion. Repeatability and reproducibility tests further confirmed stable and consistent responses, particularly under moderate drying conditions. These findings demonstrate that controlled drying temperature is a critical parameter for optimizing the structural and sensing performance of TiO<sub>2</sub>-based flexible EGFET electrodes. The results establish TiO<sub>2</sub>/PEN as a promising platform for reliable, flexible pH sensing, with potential applications in portable and wearable chemical and biomedical monitoring devices.</p>

错误：搜索内容不能为空，请输入英文关键词
错误：关键词超出字数限制，请精简
高级检索

Influence of drying temperature on the pH performance of extended-gate field-effect transistor (EGFET) using sol–gel spin-coated Tio2 on a flexible substrate

  • 期刊论文

  • 发表日期：

    2026年3月31日

查看全文
  • Norhidayatul Hikmee Mahzan,
  • Shaiful Bakhtiar Hashim,
  • Rosalena Irma Alip,
  • Zuhani Ismail Khan,
  • Sukreen Hana Herman

摘要

This work reports the fabrication and characterization of titanium dioxide (TiO₂) thin films deposited on flexible polyethylene naphthalate (PEN) substrates for application as sensing electrodes in extended-gate field-effect transistor (EGFET) pH sensors. The TiO2 films were prepared using a sol–gel spin-coating method and subjected to drying at different temperatures (room temperature, 30, 50, 70, and 100 °C). Structural and compositional analyses using scanning electron microscopy (SEM) and energy-dispersive X-ray spectroscopy (EDX) revealed that moderate thermal treatment enhanced surface uniformity and Ti–O bonding, while excessive heating led to grain growth and compositional shifts. Electrical evaluation of the fabricated devices showed that the TiO2/PEN electrode dried at 50 °C exhibited the best performance, with a sensitivity of 46 mV/pH and a linearity of 0.9986, approaching the theoretical Nernstian response. In contrast, samples dried at higher temperatures demonstrated reduced sensitivity and increased hysteresis, whereas drying at room temperature produced poor structural cohesion. Repeatability and reproducibility tests further confirmed stable and consistent responses, particularly under moderate drying conditions. These findings demonstrate that controlled drying temperature is a critical parameter for optimizing the structural and sensing performance of TiO2-based flexible EGFET electrodes. The results establish TiO2/PEN as a promising platform for reliable, flexible pH sensing, with potential applications in portable and wearable chemical and biomedical monitoring devices.