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<p>The development of wearable electronics and intelligent robotics has increased the demand for flexible, self-powered tactile sensors capable of accurately detecting external stimuli. In this work, a self-powered triboelectric tactile sensor based on a Cobalt Oxide/Polydimethylsiloxane (Co₃O₄/PDMS) composite layer was designed and fabricated to enhance sensitivity and output performance. The device consists of nylon and Co₃O₄/PDMS triboelectric layers, copper and silver electrodes, and a PET substrate, forming a contact–separation mode triboelectric nanogenerator (C-TENG). Co₃O₄ nanoparticles were uniformly incorporated into the PDMS matrix, which improved the dielectric constant and surface roughness, thereby increasing charge generation efficiency. The structural and morphological properties of the Co₃O₄/PDMS films were characterized using SEM and EDS analyses, confirming the uniform distribution of Co₃O₄ nanoparticles and the enhanced surface microstructure. The optimized device with 3.0% Co₃O₄ achieved a peak open-circuit voltage of 389.6&#xa0;V and a short-circuit current of 18.42 μA, which are 146% and 119% higher than those of PDMS-based devices. Based on the optimized configuration, a 3 × 3 array-type tactile sensor was fabricated using a scalable screen-printing technique. The array demonstrates stable voltage mapping, fast response, and high signal-to-noise ratio under different touch frequencies and pressures, enabling accurate localization of touch events. Owing to its simple fabrication, low cost, and excellent mechanical flexibility, this Co₃O₄/PDMS-based tactile sensor provides a promising platform for electronic skin, human–machine interfaces, and wearable healthcare systems.</p>

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Array-type triboelectric tactile sensor based on Co₃O₄/PDMS film

  • 期刊论文

  • 发表日期：

    2026年2月23日

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  • Rui Chen,
  • Wenle Zhou,
  • Zhilong Yang,
  • Pinxu Chen,
  • Jun Cai,
  • Mingpeng Yang,
  • Zhong Wei,
  • Licheng Deng,
  • Xingqiang Zhao

摘要

The development of wearable electronics and intelligent robotics has increased the demand for flexible, self-powered tactile sensors capable of accurately detecting external stimuli. In this work, a self-powered triboelectric tactile sensor based on a Cobalt Oxide/Polydimethylsiloxane (Co₃O₄/PDMS) composite layer was designed and fabricated to enhance sensitivity and output performance. The device consists of nylon and Co₃O₄/PDMS triboelectric layers, copper and silver electrodes, and a PET substrate, forming a contact–separation mode triboelectric nanogenerator (C-TENG). Co₃O₄ nanoparticles were uniformly incorporated into the PDMS matrix, which improved the dielectric constant and surface roughness, thereby increasing charge generation efficiency. The structural and morphological properties of the Co₃O₄/PDMS films were characterized using SEM and EDS analyses, confirming the uniform distribution of Co₃O₄ nanoparticles and the enhanced surface microstructure. The optimized device with 3.0% Co₃O₄ achieved a peak open-circuit voltage of 389.6 V and a short-circuit current of 18.42 μA, which are 146% and 119% higher than those of PDMS-based devices. Based on the optimized configuration, a 3 × 3 array-type tactile sensor was fabricated using a scalable screen-printing technique. The array demonstrates stable voltage mapping, fast response, and high signal-to-noise ratio under different touch frequencies and pressures, enabling accurate localization of touch events. Owing to its simple fabrication, low cost, and excellent mechanical flexibility, this Co₃O₄/PDMS-based tactile sensor provides a promising platform for electronic skin, human–machine interfaces, and wearable healthcare systems.