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<p>Piezoelectric ceramic materials are widely employed in actuation and sensing applications owing to their exceptional electromechanical properties. Multilayer piezoelectric actuators (MLAs) demonstrate significant reductions in driving voltage and enhanced output performance by employing a multilayer structural design that integrates internal electrodes. In this study, a high-performance PZT-based ceramic was selected to fabricate novel Ag-cofired MLAs sintered at 920 ℃ 4&#xa0;h in a dimension of 10 × 10 × 24&#xa0;mm<sup>3</sup>. The piezoelectric, dielectric, and ferroelectric characteristics of the ceramic were systematically evaluated. The fabricated MLAs exhibited a displacement of 2&#xa0;μm with minimal hysteresis (low <i>H</i> ~ 12%), while maintaining remarkable temperature stability (variation less than 14% within 30–100&#xa0;°C), pronounced strain response (<i>S</i><sub>max</sub> ~ 0.10%), and robust fatigue resistance(strain value from 0.694 to 0.671% after 10<sup>6</sup> cycles). These attributes make the developed multilayer piezoelectric materials as promising candidates for precision actuation systems. The capabilities of piezoelectric actuators are expanded by low operating voltage and high force amplitude, rendering them suitable for a wider range of control applications.</p>

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Electromechanical response of PZT-based multilayer piezoelectric ceramic actuator by low-temperature co-fired processing

  • 期刊论文

  • 发表日期：

    2026年1月11日

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  • Yangfan Zhang,
  • Lixian Wang,
  • Zhe Zhu,
  • Ruiling Chang,
  • Zhonghua Yao,
  • Hua Hao,
  • Minghe Cao,
  • Wen Zhang,
  • Hanxing Liu

摘要

Piezoelectric ceramic materials are widely employed in actuation and sensing applications owing to their exceptional electromechanical properties. Multilayer piezoelectric actuators (MLAs) demonstrate significant reductions in driving voltage and enhanced output performance by employing a multilayer structural design that integrates internal electrodes. In this study, a high-performance PZT-based ceramic was selected to fabricate novel Ag-cofired MLAs sintered at 920 ℃ 4 h in a dimension of 10 × 10 × 24 mm3. The piezoelectric, dielectric, and ferroelectric characteristics of the ceramic were systematically evaluated. The fabricated MLAs exhibited a displacement of 2 μm with minimal hysteresis (low H ~ 12%), while maintaining remarkable temperature stability (variation less than 14% within 30–100 °C), pronounced strain response (Smax ~ 0.10%), and robust fatigue resistance(strain value from 0.694 to 0.671% after 106 cycles). These attributes make the developed multilayer piezoelectric materials as promising candidates for precision actuation systems. The capabilities of piezoelectric actuators are expanded by low operating voltage and high force amplitude, rendering them suitable for a wider range of control applications.