<p>The kinetics of Ag photo-diffusion into amorphous GeS<sub>2</sub> layer on SiO<sub>2</sub> and Si substrates have been studied by specular neutron reflection and off-specular neutron scattering. It was found from the specular neutron reflection that the metastable Ag-rich reaction layer was formed between the Ag and GeS<sub>2</sub> layers first by the Ag dissolution from the Ag layer, and then, subsequent Ag diffusion occurred from the Ag-rich reaction layer to the GeS<sub>2</sub> host layer until the two layers merged into one uniform layer. The reaction process is the same as Ag/Ge<sub>20</sub>S<sub>80</sub>/ Si substrate, but it is different from GeS<sub>2</sub>/ Ag/ Si substrate. It was found from off-specular neutron scattering that the reaction interface was roughened at the early stage of the photoreaction, and that the photo-oxidized surface layer was significantly roughened by the extended light illumination after completion of Ag-diffusion.</p>

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Kinetics of silver photo-diffusion in Ag/GeS2 films: observation of the layer structure in the depth direction and the large-scale in-plane structure by specular neutron reflection and off-specular neutron scattering

  • Y. Sakaguchi,
  • T. Hanashima,
  • S. Kasai,
  • H. Aoki,
  • T. Hara,
  • Y. Murakami,
  • T. Shibuya

摘要

The kinetics of Ag photo-diffusion into amorphous GeS2 layer on SiO2 and Si substrates have been studied by specular neutron reflection and off-specular neutron scattering. It was found from the specular neutron reflection that the metastable Ag-rich reaction layer was formed between the Ag and GeS2 layers first by the Ag dissolution from the Ag layer, and then, subsequent Ag diffusion occurred from the Ag-rich reaction layer to the GeS2 host layer until the two layers merged into one uniform layer. The reaction process is the same as Ag/Ge20S80/ Si substrate, but it is different from GeS2/ Ag/ Si substrate. It was found from off-specular neutron scattering that the reaction interface was roughened at the early stage of the photoreaction, and that the photo-oxidized surface layer was significantly roughened by the extended light illumination after completion of Ag-diffusion.