Influence of plasma atmosphere on the sputter deposition of Li–Mn–O cathodes
摘要
This study examines the influence of plasma gas composition on the radiofrequency (RF) sputtering of Li–Mn–O thin films using a LiMn2O4 ceramic target. Five gas mixtures with varying Ar/O2 ratios were employed to investigate their effects on stoichiometric formation, microstructure, and electrochemical behavior. Films deposited in a pure O2 atmosphere yielded amorphous LiMn2O4 with poor electrochemical performance, exhibiting a lithium-ion diffusion coefficient of 8.85 × 10−13 cm2·s−1. In contrast, deposition under pure Ar produced partial crystalline LiMn2O4 cathode, which displayed improved lithium-ion diffusion (1.05 × 10−9 cm2·s−1) and a moderate specific capacity of 44 mAh·g−1. Notably, a balanced Ar/O2 plasma atmosphere facilitated the formation of a well-crystalline LiMn2O4 cathode, achieving superior performance with a specific capacity of 62 mAh·g−1, fast diffusion kinetics (5.45 × 10−8 cm2·s−1), and stable cycling behavior. This research work highlights the critical role of plasma composition in tailoring the functional properties of sputtered Li–Mn–O cathode materials.