<p>This study examines the influence of plasma gas composition on the radiofrequency (RF) sputtering of Li–Mn–O thin films using a LiMn<sub>2</sub>O<sub>4</sub> ceramic target. Five gas mixtures with varying Ar/O<sub>2</sub> ratios were employed to investigate their effects on stoichiometric formation, microstructure, and electrochemical behavior. Films deposited in a pure O<sub>2</sub> atmosphere yielded amorphous LiMn<sub>2</sub>O<sub>4</sub> with poor electrochemical performance, exhibiting a lithium-ion diffusion coefficient of 8.85 × 10<sup>−13</sup> cm<sup>2</sup>·s<sup>−1</sup>. In contrast, deposition under pure Ar produced partial crystalline LiMn<sub>2</sub>O<sub>4</sub> cathode, which displayed improved lithium-ion diffusion (1.05 × 10<sup>−9</sup> cm<sup>2</sup>·s<sup>−1</sup>) and a moderate specific capacity of 44 mAh·g<sup>−1</sup>. Notably, a balanced Ar/O<sub>2</sub> plasma atmosphere facilitated the formation of a well-crystalline LiMn<sub>2</sub>O<sub>4</sub> cathode, achieving superior performance with a specific capacity of 62 mAh·g<sup>−1</sup>, fast diffusion kinetics (5.45 × 10<sup>−8</sup> cm<sup>2</sup>·s<sup>−1</sup>), and stable cycling behavior. This research work highlights the critical role of plasma composition in tailoring the functional properties of sputtered Li–Mn–O cathode materials.</p>

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Influence of plasma atmosphere on the sputter deposition of Li–Mn–O cathodes

  • L. S. Valle-García,
  • F. Ambriz-Vargas,
  • R. Garza-Hernández,
  • J. S. Martínez-Flores,
  • S. Rodriguez-Carrera,
  • F. Morales-Morales,
  • L. Skokan,
  • S. Obernberger,
  • A. Ruediger,
  • F. S. Aguirre-Tostado,
  • E. Martínez-Guerra,
  • Manuel A. Quevedo-López

摘要

This study examines the influence of plasma gas composition on the radiofrequency (RF) sputtering of Li–Mn–O thin films using a LiMn2O4 ceramic target. Five gas mixtures with varying Ar/O2 ratios were employed to investigate their effects on stoichiometric formation, microstructure, and electrochemical behavior. Films deposited in a pure O2 atmosphere yielded amorphous LiMn2O4 with poor electrochemical performance, exhibiting a lithium-ion diffusion coefficient of 8.85 × 10−13 cm2·s−1. In contrast, deposition under pure Ar produced partial crystalline LiMn2O4 cathode, which displayed improved lithium-ion diffusion (1.05 × 10−9 cm2·s−1) and a moderate specific capacity of 44 mAh·g−1. Notably, a balanced Ar/O2 plasma atmosphere facilitated the formation of a well-crystalline LiMn2O4 cathode, achieving superior performance with a specific capacity of 62 mAh·g−1, fast diffusion kinetics (5.45 × 10−8 cm2·s−1), and stable cycling behavior. This research work highlights the critical role of plasma composition in tailoring the functional properties of sputtered Li–Mn–O cathode materials.