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<p>The investigation focused on a small resistive-type oxygen gas sensor composed of CeO<sub>2</sub> nanoparticles (NPs), combining a 30&#xa0;nm nanogap electrodes technique. The Pt electrodes with the gaps of as small as 30 and 50&#xa0;nm were fabricated on a thermally stable sapphire (α-Al<sub>2</sub>O<sub>3</sub>) substrate. The electron hopping mechanism with the activation energies of 0.5–0.6 eV was observed for the CeO<sub>2</sub> NPs under investigation. The sensor conductance exhibited the logarithmic linear relationship with <InlineEquation ID="IEq1"> <InlineMediaObject> <ImageObject Color="BlackWhite" FileRef="10854_2025_15369_Article_IEq1.gif" Format="GIF" Height="19" Rendition="HTML" Resolution="72" Type="Linedraw" Width="27" /> </InlineMediaObject> <EquationSource Format="TEX">\({P_{{{\text{O}}_2}}}\)</EquationSource> <EquationSource Format="MATHML"><math> <msub> <mi>P</mi> <msub> <mtext>O</mtext> <mn>2</mn> </msub> </msub> </math></EquationSource> </InlineEquation> over five digits. The value of the slope was approximately 0.26, corresponding to <i>n</i> = 4 in the <InlineEquation ID="IEq2"> <InlineMediaObject> <ImageObject Color="BlackWhite" FileRef="10854_2025_15369_Article_IEq1.gif" Format="GIF" Height="19" Rendition="HTML" Resolution="72" Type="Linedraw" Width="27" /> </InlineMediaObject> <EquationSource Format="TEX">\({P_{{{\text{O}}_2}}}\)</EquationSource> <EquationSource Format="MATHML"><math> <msub> <mi>P</mi> <msub> <mtext>O</mtext> <mn>2</mn> </msub> </msub> </math></EquationSource> </InlineEquation><sup>−1//n</sup> dependence in the oxygen-deficient metal oxide. The present oxygen gas sensor was utilized at the ambient pressure and at a relatively low operating temperature of 573&#xa0;K, exhibiting the response time of <i>t</i><sub>80</sub> less than 90&#xa0;s. The nanomaterial-combined oxygen sensor demonstrates an example of the miniaturization of gas sensing devices that have the integrated flexible use in small space.</p>

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Small oxygen sensor based on the combined technique of dispersed CeO2 nanoparticles with Pt nanogap electrodes

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  • 发表日期：

    2025年8月9日

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  • Masakuni Ozawa,
  • Ryo Kashima,
  • Masatomo Hattori,
  • Yutaka Majima

摘要

The investigation focused on a small resistive-type oxygen gas sensor composed of CeO2 nanoparticles (NPs), combining a 30 nm nanogap electrodes technique. The Pt electrodes with the gaps of as small as 30 and 50 nm were fabricated on a thermally stable sapphire (α-Al2O3) substrate. The electron hopping mechanism with the activation energies of 0.5–0.6 eV was observed for the CeO2 NPs under investigation. The sensor conductance exhibited the logarithmic linear relationship with \({P_{{{\text{O}}_2}}}\) P O 2 over five digits. The value of the slope was approximately 0.26, corresponding to n = 4 in the \({P_{{{\text{O}}_2}}}\) P O 2 −1//n dependence in the oxygen-deficient metal oxide. The present oxygen gas sensor was utilized at the ambient pressure and at a relatively low operating temperature of 573 K, exhibiting the response time of t80 less than 90 s. The nanomaterial-combined oxygen sensor demonstrates an example of the miniaturization of gas sensing devices that have the integrated flexible use in small space.