Energy storage properties and enhanced breakdown strength of calcium-doped barium zirconate titanate thin films prepared by the sol–gel method
摘要
Calcium (Ca2+)-doped BZT thin films, Ba1-xCax Zr0.2Ti0.8O3 (x = 0, 0.05, 0.1, 0.15 and 0.2), were synthesized on the Pt/Ti/SiO2/Si substrates via sol–gel spin-coating techniques for pulse capacitor applications. The microstructures, ferroelectric properties and energy storage performance of Ba1-xCaxZr0.2Ti0.8O3 thin films were characterized while adjusting the Ca2+ concentration. It is found that the Ca2+-doped BZT thin films exhibit single-phase perovskite structure. On increasing the Ca2+ concentration, the cell volume and tolerance factor declined due to the replacement of Ca2+ ions for the A-site ions in the BZT lattice. The average grain size and root-mean-square (RMS) roughness of Ba1-xCax Zr0.2Ti0.8O3 thin films with dense and uniform microstructure is refined to 44 nm and 1.55nm, respectively, with Ca2+ increasing up to x = 0.15. While lowering the leakage current density after Ca2+ modification, the breakdown field strength of Ca2+-doped BZT thin films is improved significantly approaching 4210 kV/cm at x = 0.15. Because of the enlarged polarization difference (Pm–Pr), the nano grain Ba0.85Ca0.15 Zr0.2Ti0.8O3 thin film possesses an elevated energy storage density of 33.1 J/cm3 and an acceptable energy storage efficiency of 62.1% at the ultrahigh breakdown field. The Ca-doped BZT films also have remarkable cycle reliability showing a significant potential for capacitor applications.