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<p>In this study, Single Layer Anti-reflection Coatings (SLARC) of ITO, SiO<sub>2</sub>, and TiO<sub>2</sub>, alongside with Double Layer Anti-reflection Coating (DLARC) made of SiO<sub>2</sub>/TiO<sub>2</sub>, were designed using simulation studies and subsequently fabricated on silicon substrates using RF sputtering techniques. Prior to design the ARC coatings, a method to determine the refractive index of single layer thin films deposited on silicon substrates, utilizing experimental reflectance data were devised and later used for ARC designing purpose. For refractive index calculation, this method relies on two steps: the first step includes the calculation of extinction coefficient values from the reflection and transmission spectra of films on corning 1737 substrates and later using these calculated extinction coefficient values for fitting the reflectance data of the films on silicon substrate. The experimentally observed average reflectance (R<sub>avg</sub>) (400&#xa0;nm ≤ <Emphasis Type="BoldItalic">λ</Emphasis> ≤ 1100&#xa0;nm) was 10.95% for the ITO SLARC and 4.39% for the SiO<sub>2</sub>/TiO<sub>2</sub> DLARC on silicon substrate. A strong correlation was observed between the theoretically predicted and experimentally measured reflectance spectra of the fabricated ARCs. Subsequently, these refractive indices (n) and extinction coefficient (k) values were used to simulate the performance silicon solar cells under different ARC conditions using TCAD Sentaurus. The analysis of different performance parameters includes open-circuit voltage (V<sub>OC</sub>), short-circuit current density (J<sub>SC</sub>), reflectance, external quantum efficiency (EQE), and photovoltaic efficiency. The results indicated the superiority of DLARC (SiO<sub>2</sub>/TiO<sub>2</sub>) based devices which achieved a maximum efficiency of 20.35%, compared to 18.40% for ITO SLARC and 13.54% for devices without any ARC.</p>

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Design and fabrication of anti-reflection coatings for its application in crystalline silicon solar cells

  • 期刊论文

  • 发表日期：

    2025年4月24日

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  • Anterdipan Singh,
  • Pratima Agarwal

摘要

In this study, Single Layer Anti-reflection Coatings (SLARC) of ITO, SiO2, and TiO2, alongside with Double Layer Anti-reflection Coating (DLARC) made of SiO2/TiO2, were designed using simulation studies and subsequently fabricated on silicon substrates using RF sputtering techniques. Prior to design the ARC coatings, a method to determine the refractive index of single layer thin films deposited on silicon substrates, utilizing experimental reflectance data were devised and later used for ARC designing purpose. For refractive index calculation, this method relies on two steps: the first step includes the calculation of extinction coefficient values from the reflection and transmission spectra of films on corning 1737 substrates and later using these calculated extinction coefficient values for fitting the reflectance data of the films on silicon substrate. The experimentally observed average reflectance (Ravg) (400 nm ≤ λ ≤ 1100 nm) was 10.95% for the ITO SLARC and 4.39% for the SiO2/TiO2 DLARC on silicon substrate. A strong correlation was observed between the theoretically predicted and experimentally measured reflectance spectra of the fabricated ARCs. Subsequently, these refractive indices (n) and extinction coefficient (k) values were used to simulate the performance silicon solar cells under different ARC conditions using TCAD Sentaurus. The analysis of different performance parameters includes open-circuit voltage (VOC), short-circuit current density (JSC), reflectance, external quantum efficiency (EQE), and photovoltaic efficiency. The results indicated the superiority of DLARC (SiO2/TiO2) based devices which achieved a maximum efficiency of 20.35%, compared to 18.40% for ITO SLARC and 13.54% for devices without any ARC.