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<p>It is the first time that the SnO<sub>2</sub> nanorods are fabricated on Si micropillars surface to form tree-like structures by the hydrothermal method successfully. And this structure is used to the gas sensor application. During the fabrication process, numerous micropillars are prepared on the Si wafer to overcome the SnO<sub>2</sub> nanorods falling off. The SnO<sub>2</sub> nanorods are prepared on the countless Si micropillars surface via a hydrothermal reaction. The Si micropillars, serving as substrates, can improve the adhesion between the SnO<sub>2</sub> nanorods and Si surface, which is a crucial step in successfully growing SnO<sub>2</sub> nanorods on the Si surface. In this study, the main conditions for synthesizing SnO<sub>2</sub> nanorods are optimized, including the&#xa0;concentration of the raw material, reaction time, reaction temperature, and the morphology of the Si micropillar substrate, and the growth principle of the SnO<sub>2</sub> nanorods are researched. Energy dispersive spectroscopy patterns and X-ray diffraction curves indicate that the SnO<sub>2</sub> nanorods on the Si micropillars exhibit high purity and good crystallinity. The Si wafer with this SnO<sub>2</sub> nanorods-Si micropillar tree-like structures is used for gas sensor application, and the results of the gas sensitivity test show a stable gas sensitivity performance for both alcohol and acetone.</p>

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Fabrication of the SnO2 nanorods-Si micropillars tree-like structure for gas sensor application

  • 期刊论文

  • 发表日期：

    2025年4月25日

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  • Jing Liu,
  • Futing Yi,
  • Tianchong Zhang,
  • Bo Wang

摘要

It is the first time that the SnO2 nanorods are fabricated on Si micropillars surface to form tree-like structures by the hydrothermal method successfully. And this structure is used to the gas sensor application. During the fabrication process, numerous micropillars are prepared on the Si wafer to overcome the SnO2 nanorods falling off. The SnO2 nanorods are prepared on the countless Si micropillars surface via a hydrothermal reaction. The Si micropillars, serving as substrates, can improve the adhesion between the SnO2 nanorods and Si surface, which is a crucial step in successfully growing SnO2 nanorods on the Si surface. In this study, the main conditions for synthesizing SnO2 nanorods are optimized, including the concentration of the raw material, reaction time, reaction temperature, and the morphology of the Si micropillar substrate, and the growth principle of the SnO2 nanorods are researched. Energy dispersive spectroscopy patterns and X-ray diffraction curves indicate that the SnO2 nanorods on the Si micropillars exhibit high purity and good crystallinity. The Si wafer with this SnO2 nanorods-Si micropillar tree-like structures is used for gas sensor application, and the results of the gas sensitivity test show a stable gas sensitivity performance for both alcohol and acetone.