Design of non-volatile capacitive memory using axial type-II heterostructure nanowires of NiO/β-Ga2O3
摘要
The study presents a non-volatile memory (NVM) device created from an axial NiO-nanowire (NW)/β-Ga2O3-NW heterostructure (HS) using GLAD within the RF/DC sputtering chamber. The device performance of the axial NiO-NW/β-Ga2O3-NW HS was compared to the NiO-thin film (TF)/β-Ga2O3-TF HS device. Moreover, the axial NiO-NW/β-Ga2O3-NW HS sample superior crystallinity as compared to its 2-D HS counterpart confirming a high degree of structural alignment in case of axial HS NW. The axial NiO-NW/β-Ga2O3-NW HS device showed a high accumulation capacitance of 25 pF and a conductance of 28 × 10−6 S measured at 1 MHz frequency. Furthermore, the axial NiO-NW/β-Ga2O3-NW HS memory device displayed good characteristics including a low interface state density (