Methodical tuning of NH3 gas sensing in WO3 thin films by electron beam irradiation
摘要
The present work focuses on the structure, morphology, optical and sensing analysis of Electron Beam Irradiation (EBI) treated WO3 films synthesized by the spray pyrolysis technique. X-ray diffraction (XRD) revealed a slight shift in the 2θ position, indicating stress generated due to EBI process. Scanning Electron Microscopy (SEM) morphographs presented well-defined grains at higher irradiation dosages. X-ray Photoelectron Spectroscopy (XPS) studies showed increased oxygen vacancy defects for the 5 kGy treated sample compared to unirradiated WO3. Sensing analysis of unirradiated and EBI-treated films was conducted towards ammonia (NH3) at an optimum operating temperature of 200 °C. Sensor response of 5 kGy treated film increased by − 4.5 fold compared to unirradiated film at 5 ppm NH3 concentration. The current study demonstrates the importance of EBI in tailoring the NH3 sensing properties of WO3 films.