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<p>Glancing Angle Deposition (GLAD) was employed to synthesize nanostructured CuO thin films on glass substrates by thermal evaporation under vacuum, at substrate tilt angles of 00°, 60°, 75°, and 85°. X-ray diffraction confirmed the formation of monoclinic CuO in all samples. Field-emission scanning electron microscopy revealed a progressive morphological transition from dense, compact films to well-defined columnar structures as the tilt angle increased, accompanied by a reduction in film thickness from 477 to 167&#xa0;nm. Optical analysis showed a band gap widening from 1.47&#xa0;eV to 1.72&#xa0;eV with increasing tilt angle, while electrical measurements indicated a corresponding rise in resistance for highly tilted films due to enhanced porosity. Gas sensing experiments demonstrated that both deposition angle and operating temperature strongly influence ethanol detection performance. The optimal response (S = 240) was obtained for the film deposited at 85° and operated at 300&#xa0;°C for 25&#xa0;ppm ethanol. Moreover, the sensors exhibited excellent long-term stability over a 12&#xa0;month evaluation period. These findings highlight GLAD as an effective strategy, enabling precise control of CuO nanocolumnar architecture also by tailoring the structural and functional properties of CuO thin films, making them promising candidates for highly sensitive and durable gas sensing applications.</p>

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Glancing angle deposited CuO thin films for sub-ppm ethanol detection: influence of deposition angle and operating temperature

  • 期刊论文

  • 发表日期：

    2026年3月27日

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  • M. Benamor,
  • J. Gannouni,
  • F. Chaffar Akkari

摘要

Glancing Angle Deposition (GLAD) was employed to synthesize nanostructured CuO thin films on glass substrates by thermal evaporation under vacuum, at substrate tilt angles of 00°, 60°, 75°, and 85°. X-ray diffraction confirmed the formation of monoclinic CuO in all samples. Field-emission scanning electron microscopy revealed a progressive morphological transition from dense, compact films to well-defined columnar structures as the tilt angle increased, accompanied by a reduction in film thickness from 477 to 167 nm. Optical analysis showed a band gap widening from 1.47 eV to 1.72 eV with increasing tilt angle, while electrical measurements indicated a corresponding rise in resistance for highly tilted films due to enhanced porosity. Gas sensing experiments demonstrated that both deposition angle and operating temperature strongly influence ethanol detection performance. The optimal response (S = 240) was obtained for the film deposited at 85° and operated at 300 °C for 25 ppm ethanol. Moreover, the sensors exhibited excellent long-term stability over a 12 month evaluation period. These findings highlight GLAD as an effective strategy, enabling precise control of CuO nanocolumnar architecture also by tailoring the structural and functional properties of CuO thin films, making them promising candidates for highly sensitive and durable gas sensing applications.