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<p>VO<sub>2</sub>-based thin films can control near-infrared radiation throughput across a window and hence improve energy efficiency in buildings. The films, however, are limited by low luminous transmittance and solar modulation, as well as high values of emissivity and transition temperature, hindering their practical application. To overcome some of these limitations, this study investigated properties of DC magnetron sputtered ITO/VO<sub>2</sub>/MgO multilayer films with different MgO layer thicknesses and deposition temperatures, with a focus on improving luminous transmittance and emissivity. Optical constants of individual ITO, VO<sub>2</sub>, and MgO films were modelled from the films’ transmittance and reflectance data using SCOUT software. The constants were then used to simulate the ITO (128&#xa0;nm)/VO<sub>2</sub> (50&#xa0;nm)/MgO (x nm) multilayer structures with optimum luminous transmittance (<InlineEquation ID="IEq1"> <EquationSource Format="TEX">\({T}_{\text{lum}}\)</EquationSource> <EquationSource Format="MATHML"><math> <msub> <mi>T</mi> <mtext>lum</mtext> </msub> </math></EquationSource> </InlineEquation>) of 44% with x = 75&#xa0;nm. Experimental deposition of this structure with different MgO layer deposition temperatures provided the highest <InlineEquation ID="IEq2"> <EquationSource Format="TEX">\({T}_{\text{lum}}\)</EquationSource> <EquationSource Format="MATHML"><math> <msub> <mi>T</mi> <mtext>lum</mtext> </msub> </math></EquationSource> </InlineEquation> of 41% when deposited at 200&#xa0;°C compared to 33% for a single-layer VO<sub>2</sub> film on SLG substrate, as calculated from UV/Vis/NIR spectrophotometry data. On the other hand, the highest <InlineEquation ID="IEq3"> <EquationSource Format="TEX">\(\Delta {T}_{\text{sol}}\)</EquationSource> <EquationSource Format="MATHML"><math> <mrow> <mi mathvariant="normal">Δ</mi> <msub> <mi>T</mi> <mtext>sol</mtext> </msub> </mrow> </math></EquationSource> </InlineEquation> was achieved by VO<sub>2</sub> films on ITO glass at <InlineEquation ID="IEq4"> <EquationSource Format="TEX">\(\Delta {T}_{\text{sol}}\)</EquationSource> <EquationSource Format="MATHML"><math> <mrow> <mi mathvariant="normal">Δ</mi> <msub> <mi>T</mi> <mtext>sol</mtext> </msub> </mrow> </math></EquationSource> </InlineEquation>~ 13%, compared <InlineEquation ID="IEq5"> <EquationSource Format="TEX">\(\Delta {T}_{\text{sol}}\)</EquationSource> <EquationSource Format="MATHML"><math> <mrow> <mi mathvariant="normal">Δ</mi> <msub> <mi>T</mi> <mtext>sol</mtext> </msub> </mrow> </math></EquationSource> </InlineEquation>~ 11% for VO<sub>2</sub> films grown on SLG glass. The lowest emissivity of ~ 0.89 and 0.92 was obtained for high and low-temperature phases of the ITO/VO<sub>2</sub>/MgO films prepared at MgO layer deposition temperature of 350&#xa0;<InlineEquation ID="IEq6"> <EquationSource Format="TEX">\(^\circ{\rm C}\)</EquationSource> <EquationSource Format="MATHML"><math> <mrow> <mmultiscripts> <mrow /> <mrow /> <mo>∘</mo> </mmultiscripts> <mi mathvariant="normal">C</mi> </mrow> </math></EquationSource> </InlineEquation>. These results suggest the potential of the ITO/VO<sub>2</sub>/MgO multilayer structure as a promising, energy-efficient smart window coating that combines thermochromism and low emissivity properties.</p>

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Influence of MgO layer deposition temperature on the optical and structural properties of thermochromic ITO/VO2/mgo multilayer films for smart windows

  • 期刊论文

  • 发表日期：

    2026年2月2日

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  • Nickson E. Mmary,
  • Margaret E. Samiji,
  • Nuru R. Mlyuka

摘要

VO2-based thin films can control near-infrared radiation throughput across a window and hence improve energy efficiency in buildings. The films, however, are limited by low luminous transmittance and solar modulation, as well as high values of emissivity and transition temperature, hindering their practical application. To overcome some of these limitations, this study investigated properties of DC magnetron sputtered ITO/VO2/MgO multilayer films with different MgO layer thicknesses and deposition temperatures, with a focus on improving luminous transmittance and emissivity. Optical constants of individual ITO, VO2, and MgO films were modelled from the films’ transmittance and reflectance data using SCOUT software. The constants were then used to simulate the ITO (128 nm)/VO2 (50 nm)/MgO (x nm) multilayer structures with optimum luminous transmittance ( \({T}_{\text{lum}}\) T lum ) of 44% with x = 75 nm. Experimental deposition of this structure with different MgO layer deposition temperatures provided the highest \({T}_{\text{lum}}\) T lum of 41% when deposited at 200 °C compared to 33% for a single-layer VO2 film on SLG substrate, as calculated from UV/Vis/NIR spectrophotometry data. On the other hand, the highest \(\Delta {T}_{\text{sol}}\) Δ T sol was achieved by VO2 films on ITO glass at \(\Delta {T}_{\text{sol}}\) Δ T sol ~ 13%, compared \(\Delta {T}_{\text{sol}}\) Δ T sol ~ 11% for VO2 films grown on SLG glass. The lowest emissivity of ~ 0.89 and 0.92 was obtained for high and low-temperature phases of the ITO/VO2/MgO films prepared at MgO layer deposition temperature of 350  \(^\circ{\rm C}\) ∘ C . These results suggest the potential of the ITO/VO2/MgO multilayer structure as a promising, energy-efficient smart window coating that combines thermochromism and low emissivity properties.