<p>We predict the performance gap between the <i>n-</i> and <i>p</i>-type WZ-InSb nanowires (NWs) with gate-all-around (GAA) configuration for the complementary metal oxide semiconductor (CMOS) field-effect transistors (FETs) at the sub-1&#xa0;nm nanowire diameter (<i>D</i><sub>NW</sub>) at the gate length (<i>L</i><sub>g</sub>) of sub-5&#xa0;nm, simulated for the first time by using an accurate ab initio quantum transport simulation technique. Bulk indium antimony (InSb) has nearly 55 times higher electron mobility <InlineEquation ID="IEq1"> <EquationSource Format="TEX">\({\mu }_{\text{e}}\)</EquationSource> <EquationSource Format="MATHML"><math> <msub> <mi>μ</mi> <mtext>e</mtext> </msub> </math></EquationSource> </InlineEquation> than silicon but suffers from a much lower hole mobility <InlineEquation ID="IEq2"> <EquationSource Format="TEX">\({\mu }_{\text{h}}\)</EquationSource> <EquationSource Format="MATHML"><math> <msub> <mi>μ</mi> <mtext>h</mtext> </msub> </math></EquationSource> </InlineEquation> (<InlineEquation ID="IEq3"> <EquationSource Format="TEX">\({\mu }_{\text{e}}\)</EquationSource> <EquationSource Format="MATHML"><math> <msub> <mi>μ</mi> <mtext>e</mtext> </msub> </math></EquationSource> </InlineEquation>/<InlineEquation ID="IEq4"> <EquationSource Format="TEX">\({\mu }_{\text{h}}\)</EquationSource> <EquationSource Format="MATHML"><math> <msub> <mi>μ</mi> <mtext>h</mtext> </msub> </math></EquationSource> </InlineEquation> = 90), thus unsuited to CMOS application with a single material. In the&#xa0;sub-1&#xa0;nm <i>D</i><sub>NW</sub>, the light hole and heavy hole band inversion has diminished the performance gap of the <i>n-</i>type and <i>p</i>-type WZ-InSb NW MOSFETs. Excellent gate scaling performance is achieved at <i>L</i><sub>g</sub> = 3&#xa0;nm, with on-state current of 1507/4953&#xa0;μA/μm and subthreshold swing of 84/67&#xa0;mV/dec for the <i>n-</i>/<i>p</i>-type devices, respectively. Our predictions for the <i>n-</i> and <i>p</i>-type WZ-InSb GAA <i>D</i><sub>NW</sub> FETs can pave the way to extend Moore’s law for future electronics with the physical size of transistors to the sub-5&#xa0;nm CMOS-integrated circuits.</p> Graphical abstract <p></p>

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Scaling behavior of ultrathin gate-all-around InSb nanowire transistors

  • Mughira Ghafoor,
  • Salah Ud Din,
  • Sufaid Shah,
  • Matin Ashurov,
  • Quihui Li,
  • Jing Lu

摘要

We predict the performance gap between the n- and p-type WZ-InSb nanowires (NWs) with gate-all-around (GAA) configuration for the complementary metal oxide semiconductor (CMOS) field-effect transistors (FETs) at the sub-1 nm nanowire diameter (DNW) at the gate length (Lg) of sub-5 nm, simulated for the first time by using an accurate ab initio quantum transport simulation technique. Bulk indium antimony (InSb) has nearly 55 times higher electron mobility \({\mu }_{\text{e}}\) μ e than silicon but suffers from a much lower hole mobility \({\mu }_{\text{h}}\) μ h ( \({\mu }_{\text{e}}\) μ e / \({\mu }_{\text{h}}\) μ h = 90), thus unsuited to CMOS application with a single material. In the sub-1 nm DNW, the light hole and heavy hole band inversion has diminished the performance gap of the n-type and p-type WZ-InSb NW MOSFETs. Excellent gate scaling performance is achieved at Lg = 3 nm, with on-state current of 1507/4953 μA/μm and subthreshold swing of 84/67 mV/dec for the n-/p-type devices, respectively. Our predictions for the n- and p-type WZ-InSb GAA DNW FETs can pave the way to extend Moore’s law for future electronics with the physical size of transistors to the sub-5 nm CMOS-integrated circuits.

Graphical abstract