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<p>Multiple-component nitrided hard film metal group element ratios directly affect the organization and properties of the hard film. Thermal shock resistance is a direct response to the prospects of hard films in the field of thermal processing. In this study, TiCrN hard films with the same nitrogen element and different Ti/Cr atomic ratios were obtained by adopting the multi-arc ion plating deposition technique through a reasonable combination of cathode targets and adjusting the arc current of the cathode targets. The chemical composition, morphology and organization, phase composition, hard film hardness, film base bonding force, and thermal shock resistance of the prepared TiCrN hard film were systematically investigated, and the influence of Ti/Cr composition ratio on TiCrN hard film was revealed. The experimental results show that TiCrN hard films with different Ti/Cr atomic ratios have good base bonding. With the increase oin Ti/Cr atomic ratio, the hardness of hard film shows a tendency of increasing and then decreasing. The hard films with Ti/Cr atomic ratio of 1.15 showed the best thermal shock resistance at 600&#xa0;°C and 700&#xa0;°C. The unique contribution of this study lies in integrating variations in the proportion of metallic elements within hard films with conventional mechanical properties, alongside thermal shock resistance and oxidation resistance. This study provides a reliable basis for designing hard film compositions with excellent overall mechanical properties, which have great potential for tool hard film applications.</p>

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Research on the microstructure and properties of TiCrN hard films with different Ti/Cr atomic ratios

  • 期刊论文

  • 发表日期：

    2025年10月29日

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  • Hongtao Shen,
  • Bushi Dai,
  • Yu Zhang,
  • Guangchao Liu,
  • Zheping Chen,
  • Jun Zhang

摘要

Multiple-component nitrided hard film metal group element ratios directly affect the organization and properties of the hard film. Thermal shock resistance is a direct response to the prospects of hard films in the field of thermal processing. In this study, TiCrN hard films with the same nitrogen element and different Ti/Cr atomic ratios were obtained by adopting the multi-arc ion plating deposition technique through a reasonable combination of cathode targets and adjusting the arc current of the cathode targets. The chemical composition, morphology and organization, phase composition, hard film hardness, film base bonding force, and thermal shock resistance of the prepared TiCrN hard film were systematically investigated, and the influence of Ti/Cr composition ratio on TiCrN hard film was revealed. The experimental results show that TiCrN hard films with different Ti/Cr atomic ratios have good base bonding. With the increase oin Ti/Cr atomic ratio, the hardness of hard film shows a tendency of increasing and then decreasing. The hard films with Ti/Cr atomic ratio of 1.15 showed the best thermal shock resistance at 600 °C and 700 °C. The unique contribution of this study lies in integrating variations in the proportion of metallic elements within hard films with conventional mechanical properties, alongside thermal shock resistance and oxidation resistance. This study provides a reliable basis for designing hard film compositions with excellent overall mechanical properties, which have great potential for tool hard film applications.