Enhanced high overall performance of solution-processed ITO/IGO thin-film transistor via heterogeneous-bilayer channel
摘要
The solution-processed oxide thin-film transistors (TFTs) are one of the most promising candidates for advanced display applications. However, a large number of native defects in oxide semiconductor engrain an inherent trade-off between mobility and stability in oxide TFTs, especially for single-layer-channel TFTs. In this work, an indium-tin-oxide/indium-gallium-oxide (ITO/IGO) heterogeneous-bilayer-channel TFT is fabricated to solve this problem. The ITO/IGO TFT exhibits a high mobility of 17.44 cm2 V−1 s−1, which is nearly 10 times higher than that of the single-layer-channel IGO TFTs. Furthermore, the ITO/IGO TFT has superior electrical characteristics, such as threshold voltage of − 0.4 V, subthreshold swing of 112.6 mV/dec, on/off-state current ratio of 2.81 × 107, and a good stability performance. In ITO/IGO system, the ITO thin film acts as a carrier generation layer, while the IGO thin film ensures a low off-state current and enhances stability. Moreover, the difference of bandgap between ITO and IGO thin films leads to form an energy barrier to confine carriers at two-dimensional direction, which can increase the mobility of TFTs. The heterogeneous-bilayer-channel strategy may pave the way for solution-processed TFT technology.