Deposition of a CVD diamond coating on a carbonized VO₂ film

To obtain the VO₂ film/CVD diamond-coated tools, the deposition process of CVD diamond coating on the VO₂ film surface is investigated in this paper. Firstly, the effect of carbonization treatment on VO₂ film is studied. Then, the deposition process of CVD diamond coating on the VO₂ film is studied. Finally, it is studied that the change law of the VO₂ film/CVD diamond coating system stresses under thermal loading. Results indicate that the CVD diamond coating can be grown on the VO₂ film after carbonization and diamond seed crystal treatment. The V₆C₅ is the most stable material after the carbonization of the VO₂ film, and it is used to connect diamond coating and VO₂ film. The VO₂ film/CVD diamond coating system stress undergoes a sudden change under thermal loading. After the sudden change of stress, the VO₂ film/CVD diamond coating system stress is only half of the CVD diamond coating stress. The adhesion of CVD diamond coating is more than 100 N. This study can provide a new idea for the deposition of CVD diamond-coated cutting tools with high bonding performance.