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<p>The aim of this paper is to study the effects of calibration and compensation in the high-temperature characterization (up to 90&#xa0;°C) of an integrated component at low frequencies (40&#xa0;Hz − 110&#xa0;MHz). The 4294&#xa0;A impedance meter will be used to carry out measurements at these frequencies. In this paper, we will present the methods used to assess the influence of calibration on measurement accuracy. Repeatability and reproducibility measurements are carried out under different calibration conditions. Firstly, we carried out a calibration and compensation at ambient temperature, and then performed repeatability and reproducibility measurements of the short and resistance device corrected with the short at ambient and at temperature. Other series of device measurements were then carried out with calibration and compensation at each temperature. It turned out that calibrating at room temperature followed by short correction same as above provides optimal repeatability. However, care must be taken with the contact between the probe and the device, which has a major influence on the dispersion of low-impedance measurements. A study of contact sensitivity was carried out in order to estimate and highlight the risk of measurement errors introduced by these phenomena. In order to minimize contact resistance at the measurement probes, it is necessary to have a penetration of around 500&#xa0;nm into the conductive layer. The technique adopted is therefore to calibrate and compensate for ambient conditions, remeasure the shorts at each temperature and then correct the measurement, to the measurement that is most suitable for high-temperature characterization.</p>

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Calibration Impact on the Characterization of Components at Temperature

  • 期刊论文

  • 发表日期：

    2025年8月16日

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  • D. A. Oumar,
  • M. I. Boukhari,
  • S. Capraro,
  • D. Pietroy,
  • J. P. Chatelon,
  • J. J. Rousseau

摘要

The aim of this paper is to study the effects of calibration and compensation in the high-temperature characterization (up to 90 °C) of an integrated component at low frequencies (40 Hz − 110 MHz). The 4294 A impedance meter will be used to carry out measurements at these frequencies. In this paper, we will present the methods used to assess the influence of calibration on measurement accuracy. Repeatability and reproducibility measurements are carried out under different calibration conditions. Firstly, we carried out a calibration and compensation at ambient temperature, and then performed repeatability and reproducibility measurements of the short and resistance device corrected with the short at ambient and at temperature. Other series of device measurements were then carried out with calibration and compensation at each temperature. It turned out that calibrating at room temperature followed by short correction same as above provides optimal repeatability. However, care must be taken with the contact between the probe and the device, which has a major influence on the dispersion of low-impedance measurements. A study of contact sensitivity was carried out in order to estimate and highlight the risk of measurement errors introduced by these phenomena. In order to minimize contact resistance at the measurement probes, it is necessary to have a penetration of around 500 nm into the conductive layer. The technique adopted is therefore to calibrate and compensate for ambient conditions, remeasure the shorts at each temperature and then correct the measurement, to the measurement that is most suitable for high-temperature characterization.