<p>Studies were carried out on thin films of ZnO + 15% Co deposited in vacuum (<i>p</i> = 2.2∙10–2 mm Hg) on quartz and silicon substrates by multipulsed high-frequency (<i>f</i> ~ 10–12 kHz) laser action on a ceramic target with laser power density <i>q</i> = 81 MW/cm<sup>2</sup>. The morphology of the resultant films was studied by atomic force microscopy. The transmission spectra of these films are discussed. The photoelectric properties of the ZnO + 15% Co/Si structure are analyzed.</p>

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Surface Morphology, Optical and Electrophysical Properties of Cobalt-Doped Zinc Oxide Films Produced by Laser Deposition

  • N. A. Bosak,
  • S. T. Pashayan,
  • L. V. Baran,
  • V. V. Malutina-Bronskaya,
  • V. S. Drobush,
  • A. S. Kuzmitskaya

摘要

Studies were carried out on thin films of ZnO + 15% Co deposited in vacuum (p = 2.2∙10–2 mm Hg) on quartz and silicon substrates by multipulsed high-frequency (f ~ 10–12 kHz) laser action on a ceramic target with laser power density q = 81 MW/cm2. The morphology of the resultant films was studied by atomic force microscopy. The transmission spectra of these films are discussed. The photoelectric properties of the ZnO + 15% Co/Si structure are analyzed.