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<p>A method for producing a coating with a reduced optical reflectivity based on nanoporous germanium layers by implantation of monocrystalline <i>c</i>-germanium with <sup>209</sup>Bi<sup>++</sup> ions at an energy of <i>E</i> = 72 keV, current density <i>J</i> = μA/cm<sup>2</sup>, and dose interval <i>D</i> = 1.3∙10<sup>15</sup>-2.5∙10<sup>16</sup> ions/cm<sup>2</sup> is proposed. Starting from <i>D</i> = 6.2∙10<sup>15</sup> ions/cm<sup>2</sup>, a swollen spongy Bi:PGe layer is formed with thickness of about 100 nm. This layer, which does not undergo change in morphology with increasing <i>D</i>, consists of thin interwoven germanium nanowires. The layer has a low optical reflectivity (&lt;3%) in the visible spectral range.</p>

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Thin-Film Coating with Reduced Optical Reflectivity Based on a Nanoporous Germanium Layer

  • 期刊论文

  • 发表日期：

    2025年11月5日

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  • A. L. Stepanov,
  • A. M. Rogov,
  • V. F. Sotnikova,
  • V. F. Valeev,
  • V. I. Nuzhdin,
  • D. A. Konovalov

摘要

A method for producing a coating with a reduced optical reflectivity based on nanoporous germanium layers by implantation of monocrystalline c-germanium with 209Bi++ ions at an energy of E = 72 keV, current density J = μA/cm2, and dose interval D = 1.3∙1015-2.5∙1016 ions/cm2 is proposed. Starting from D = 6.2∙1015 ions/cm2, a swollen spongy Bi:PGe layer is formed with thickness of about 100 nm. This layer, which does not undergo change in morphology with increasing D, consists of thin interwoven germanium nanowires. The layer has a low optical reflectivity (<3%) in the visible spectral range.