Hot Strip on-a-Chip Method for the Steady-State Measurement of the Thermal Conductivity of Gases
摘要
The hot strip on-a-chip method is a micro-electromechanical system (MEMS) sensor that requires only very small amounts of sample for characterization. While the “classical” transient operation of the method has been successfully used to measure the thermal conductivity of fluids, the steady-state operation has so far been shown to be suitable for analyzing gas flow rates. In the present study, it is demonstrated that the steady-state hot strip (SSHS) on-a-chip method can also be applied to gases in a quiescent state to determine their thermal conductivity λ in an absolute way. Due to the very small sample volume of around 5 µL and short measurement duration of some tens of milliseconds, there is no onset of free convection during the measurement. Other significant, well-understood effects, formerly known as systematic errors, can be corrected comprehensively by applying a mathematical tool, the parametric identity mapping (PIM), to the relevant data reduction. It was found that the signals from the seven radially distributed temperature probes in the sensor agree with the theory for the concentric cylinder method. According to ISO “Guide to the Expression of Uncertainty in Measurement,” the relative expanded uncertainty (coverage factor k = 2) of the sensor is assessed as Ur(λ) = 0.016. This result has been experimentally verified for gaseous methane at 296 K and 0.1 MPa. The deviation of the measured thermal conductivity from the reference value is 1.1 %. This small departure provides empirical evidence for the concept of the SSHS method and demonstrates its reliability in measuring λ.